Silicon‐on‐Insulator Based Thin‐Film Resistor for Chemical and Biological Sensor Applications

Nikolaides MG, Rauschenbach S, Luber S, Buchholz K, Tornow M, Abstreiter G, Bausch AR

17 October 2003

Journal article

Journal:

ChemPhysChem

Volume:

Issue:

Wiley

pp.

1104 - 1106

No abstract available

Keywords:

3403 Macromolecular and Materials Chemistry

34 Chemical Sciences

3406 Physical Chemistry

Biosensing Techniques

Chemistry Techniques, Analytical

Equipment Design

Silicon

Surface Properties

DOI