Spatial Atomic Layer Deposition for Energy and Electronic Devices

Hoye RLZ, Muñoz-Rojas D, Sun Z, Okcu H, Asgarimoghaddam H, MacManus-Driscoll JL, Musselman KP

1 February 2025

Journal article

Journal:

PRX Energy

Volume:

Issue:

American Physical Society (APS)

017002

No abstract available

Keywords:

40 Engineering

4016 Materials Engineering

34 Chemical Sciences

3406 Physical Chemistry

DOI